High-purity nitrogen is an indispensable basic raw material for the electronics industry. For example, in the manufacturing and production process of semiconductors and integrated circuits, high-purity nitrogen is required to protect and clean them to ensure the quality of semiconductors and integrated circuits; in industries such as semiconductor batteries and electronic alloy materials, high-purity nitrogen is used for electronic Product packaging, sintering, annealing, reduction, storage and other links; in the processing of large-scale integrated circuits, color TV picture tube liquid crystals and semiconductor components, high-purity nitrogen is used as a very important nitrogen source; in monocrystalline silicon, polycrystalline silicon and some The use of high-purity nitrogen in epitaxial products can not only improve production efficiency, but also effectively improve product quality.
In industry, carbon molecular sieve pressure swing adsorption is used to separate air to produce nitrogen, and the concentration of nitrogen produced is 95%~99.999%, which meets the concentration requirements of industrial production such as the electronics industry.
Carbon molecular sieve belongs to carbon adsorbent, which is a porous substance composed of carbon, and the pore structure model is a disordered stacked carbon structure. Carbon molecular sieves are non-stoichiometric compounds, and their important properties are based on their microporous structure. Its ability to separate air depends on the different diffusion speeds of various gases in the air in the micropores of carbon molecular sieves, or different adsorption forces, or both effects work at the same time. Under equilibrium conditions, the adsorption capacity of carbon molecular sieves to oxygen and nitrogen is quite close, but the diffusion rate of oxygen molecules through the narrow gaps of the carbon molecular sieve microporous system is much faster than that of nitrogen molecules. Carbon molecular sieve air separation nitrogen production is based on this Performance, nitrogen is separated from air by the PSA process well before a time when equilibrium conditions are reached.
